ROBOT, SYSTEM, CONTROL METHOD, AND COMPUTER-READABLE STORAGE MEDIUM
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United States of America
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Issued Date -
Mar 13, 2025
app pub date -
Sep 5, 2024
filing date -
Sep 5, 2024
priority date (Note) -
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Abstract
Provided is a robot arranged in a housing, the robot including: a first movable portion; a second movable portion having a hand holding a wafer; and a control unit which controls the first movable portion and the second movable portion so as to convey the wafer in a state where the wafer held by the hand is located inside an operation region defined in a space between a front wall and a back wall so as not to overlap an open/close region for a cassette opener, which is provided at a position corresponding to an opening of the front wall, to open and close a cassette, and to cause the hand to access the opening of the front wall in a state where the hand is parallel to a horizontal plane.
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