Importance

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Abstract

A substrate transport apparatus includes a pair of dual arms having first dual arms and second dual arms; and a drive section. The drive section has a motor, that describes a motion with a predetermined stroke that raises and lowers a corresponding end effector of the first dual arms so that at least a first top end effector and a first bottom end effector each place and pick a substrate from each level of a triple stack load lock with the predetermined stroke of substantially 175 mm. A first bottom arm and a first top arm, of the first dual arms, are arranged so that a bottom-most link of the first dual arms is located within a height from substantially 120.5 mm below the substantially level substrate transport plane corresponding to a bottom-most end effector of the first dual arms.

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First Claim