FOCUS RING ALIGNMENT APPARATUS
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United States of America
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Issued Date -
Mar 13, 2025
app pub date -
Feb 28, 2024
filing date -
Feb 28, 2024
priority date (Note) -
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status (Latency Note)
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Abstract
An embodiment provides a focus ring alignment apparatus including a frame, a sensing member that is connected to the frame and is configured to acquire images of a focus ring within in a substrate processing apparatus, and an alignment module that is connected to the frame and is configured to move the focus ring to change a position of the focus ring.
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