Optics for In-Situ Scanning Electron Microscope Repair
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United States of America
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Issued Date -
Mar 13, 2025
app pub date -
Dec 15, 2023
filing date -
Dec 15, 2023
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Abstract
An apparatus is loaded into a scanning electron microscope (SEM) through a load lock of the SEM and onto a stage of the SEM. The apparatus includes a substrate and also includes optics, mechanically coupled to the substrate, to direct light upward away from the substrate. With the apparatus on the stage of the SEM, the optics are used to direct the light upward through an aperture of the SEM onto an electron detector in the SEM.
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