HIGH CONTRAST GRATING FOR HIGHLY REFLECTIVE MEMS SURFACE FOR LIDAR
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United States of America
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Issued Date -
Mar 13, 2025
app pub date -
Nov 22, 2024
filing date -
Nov 22, 2024
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Abstract
A grating for a steering mirror of a LiDAR system is made without a metal coating. The grating comprising a plurality of ridges defined by a period. The period has a width that is equal to or less than a wavelength of a laser of the LiDAR system. The ridges can be made of crystalline silicon to form a high-contrast grating.
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