CARRIER-RESOLVED HALL MEASUREMENT WITH MULTI-HARMONIC MAGNETORESISTANCE ANALYSIS
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United States of America
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Issued Date -
Mar 13, 2025
app pub date -
Sep 11, 2023
filing date -
Sep 11, 2023
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Abstract
A method, system, and a computer program product characterize a semiconductor. The method includes receiving longitudinal and transverse magnetoresistance measurements of a sample with first and second channels in a parallel magnetic field and receiving longitudinal and transverse magnetoresistance measurements of the sample in a perpendicular magnetic field. The method also includes subtracting the magnetoresistances measured in the parallel magnetic field from the magnetoresistances measured in the perpendicular field to obtain longitudinal and transverse magnetoresistance values Rxx and Rxy. The method further includes determining, based on the values Rxx and Rxy, harmonic magnetoresistance coefficients a0, and a2, b1, and b3. A method and system for semiconductor testing and characterization are disclosed as well.
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