RESISTANCE MEASUREMENTS IN ELECTRICAL CHARACTERIZATION SYSTEM
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United States of America
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Issued Date -
Mar 13, 2025
app pub date -
Sep 11, 2023
filing date -
Sep 11, 2023
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Abstract
A system comprises a prober unit, and a control unit. The prober unit comprises electrical probes. The control unit configured to: cause the prober unit to make contact between the electrical probes and contact pads of a target device; cause the prober unit to increment a contact overdrive by a specified amount to increase a contact pressure between the electrical probes and the contact pads of the target device; measure a contact resistance between the electrical probes and the contact pads of the target device, subsequent to incrementing the contact overdrive; compare the measured contact resistance with a contact resistance threshold; and determine whether to perform an electrical characterization measurement of the target device, based on a result of comparing the measured contact resistance with the contact resistance threshold.
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