PRESSURE SENSOR WITH INTEGRATED FLUID CAVITY
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United States of America
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Issued Date -
Mar 13, 2025
app pub date -
Apr 3, 2024
filing date -
Apr 3, 2024
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Abstract
Aspects of the subject technology relate to electronic devices with pressure sensors having an integrated fluid cavity. The electronic device includes a housing having an opening. The electronic device also includes a pressure sensor disposed within the housing and adjacent to the opening. The pressure sensor includes a substrate and a sensing membrane disposed on the substrate that is configured to obtain pressure data. The pressure sensor also includes a membrane support disposed on the substrate and an outer membrane disposed on the membrane support. The pressure sensor also includes reference cavity formed between the sensing membrane and the substrate. The pressure sensor also includes a fluid cavity disposed between the sensing membrane and the outer membrane. In some aspects, the outer membrane forms a hermetic seal around the fluid cavity. In other aspects, the outer membrane has a stiffness that is lesser than the sensing membrane.
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