METHOD OF MANUFACTURING SILICON CARBIDE WAFER AND METHOD OF MANUFACTURING SILICON CARBIDE INGOT
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United States of America
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Issued Date -
Mar 13, 2025
app pub date -
Nov 4, 2022
filing date -
Nov 4, 2022
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Abstract
Disclosed is a method of manufacturing a silicon carbide wafer. The method of manufacturing a silicon carbide wafer includes a step of disposing a silicon carbide block in a crucible; a step of sublimating a silicon carbide included in the silicon carbide block to form a silicon carbide ingot; and a step of processing the silicon carbide ingot.
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