MEMS ELECTRICALLY CONNECTED PRECISION MOTION STAGE WITH POSITION SENSOR
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United States of America
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Mar 13, 2025
app pub date -
Sep 10, 2024
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Sep 10, 2024
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Abstract
An electrically-connected MEMS precision motion stage includes a stationary portion, one or more electrically-conductive MEMS flexure assemblies coupled to the stationary portion, a movable portion coupled to the one or more electrically-conductive MEMS flexure assemblies, one or more motion control assemblies disposed between the stationary portion and the movable portion and configured to control motion of the movable portion, and one or more position sensors disposed adjacent to the one or more motion control assemblies and configured to enable detection of movement of the one or more motion control assemblies, respectively.
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