ROBOT AND SYSTEM
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United States of America
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Issued Date -
Mar 13, 2025
app pub date -
Sep 5, 2024
filing date -
Sep 5, 2024
priority date (Note) -
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status (Latency Note)
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Abstract
Provided is a robot including: a first movable portion which has a first arm having a proximal end side connected to a first base and a second arm having a proximal end side connected to a distal end side of the first arm; a second movable portion which has a second base having a proximal end side connected to a distal end side of the second arm, a third arm having a proximal end side connected to a distal end side of the second base, and a hand having a proximal end side connected to a distal end side of the third arm and holding a wafer; and a control unit, and a width, in a direction perpendicular to the vertical plane, of a trajectory of the first movable portion falls within a width, in the direction perpendicular to the vertical plane, of a trajectory of the wafer.
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