SYSTEM AND ROBOT
Number of patents in Portfolio can not be more than 2000
United States of America
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N/A
Issued Date -
Mar 13, 2025
app pub date -
Sep 5, 2024
filing date -
Sep 5, 2024
priority date (Note) -
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status (Latency Note)
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Abstract
Provided is a system including: a housing having a front wall including a plurality of openings for access to a cassette storing a wafer and a back wall facing the front wall; and a robot arranged in the housing, in which the robot has a first base, a first movable portion, a second movable portion having a hand holding the wafer, and a control unit which controls the first movable portion and the second movable portion, and the plurality of openings are positioned in a maximum accessible region of the hand determined based on a position where the robot is arranged in the housing, a length of the first movable portion in a state where the first movable portion is maximally extended, and a length of the second movable portion in a state where the second movable portion is maximally extended.
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