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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
SANDISK TECHNOLOGIES INC	951 SANDISK DRIVE LEGAL DEP MILPITAS CA 95035

International Classification(s)

• B24B:MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR PO....
• H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
KISHIMOTO, Koji	Yokkaichi, JP	29	505
YAMADA, Yohei	Yokkaichi, JP	75	199
YAMAGUCHI, Minoru	Yokkaichi, JP	72	598

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
3.5 Year Payment	$1600.00	$800.00	$400.00	Sep 13, 2028
7.5 Year Payment	$3600.00	$1800.00	$900.00	Sep 13, 2032
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Surcharge - 3.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
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Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2025/0083,282

CHEMICAL MECHANICAL POLISHING PROCESS USING STEAM FOR POLISHING FLUID DELIVERY AND AN APPARATUS FOR IMPLEMENTING THE SAME

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