METHODS AND MECHANISMS FOR VIBRATION MONITORING
Number of patents in Portfolio can not be more than 2000
United States of America
Stats
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N/A
Issued Date -
Mar 6, 2025
app pub date -
Sep 6, 2023
filing date -
Sep 6, 2023
priority date (Note) -
Published
status (Latency Note)
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Importance

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Non-US Coverage
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Abstract
An electronic device manufacturing system is provided that includes a monitoring system coupled to a tool. The monitoring system comprises a body to mount to a surface of a tool; a vibration detecting sensor disposed in or on the body, the vibration detecting sensor to generate a signal based on a vibration of the surface; a wired communication device disposed in or on the body, wherein in a first configuration the wired communication device is to transmit the signal generated by the vibration detecting sensor to the computer system via a wired connection with the computer system; and a wireless communication device disposed in or on the body, wherein in a second configuration the wireless communication device is to establish a wireless connection with the computer system and to transmit the signal generated by the vibration detecting sensor to the computer system via the wireless connection.
First Claim
all claims..Other Claims data not available
Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
APPLIED MATERIALS INC | 3050 BOWERS AVENUE SANTA CLARA CA 95054 |
International Classification(s)

- 2023 Application Filing Year
- C23C Class
- 1736 Applications Filed
- 317 Patents Issued To-Date
- 18.27 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Panda, Punyabrahma | Bangalore, IN | 2 | 0 |
# of filed Patents : 2 Total Citations : 0 | |||
Saravanavel, Ganapathy | Madurai, IN | 2 | 0 |
# of filed Patents : 2 Total Citations : 0 | |||
Wang, Zhi | Redwood City, US | 282 | 3398 |
# of filed Patents : 282 Total Citations : 3398 | |||
Zhang, Tao | San Ramon, US | 1018 | 9317 |
# of filed Patents : 1018 Total Citations : 9317 |
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Patent Citation Ranking
- 0 Citation Count
- C23C Class
- 0 % this patent is cited more than
- < 1 Age
Forward Cite Landscape
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
---|---|---|---|---|
3.5 Year Payment | $1600.00 | $800.00 | $400.00 | Sep 6, 2028 |
7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Sep 6, 2032 |
11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Sep 6, 2036 |
Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge - 3.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge - 7.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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