Importance

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Abstract

An adjustment method is provided for an inspection apparatus configured to inspect an inspection object by bringing a tip of a probe disposed on a probe card into contact with an electrode disposed on the inspection object. The method includes projecting, by a projector, an optical dot pattern in which optical dots are arranged, receiving the optical dots by a light receiver, capturing a standard image including the optical dots projected by the projector, capturing a measurement image including at least two of the optical dots of the optical dot pattern received by the light receiver, and adjusting a stage on which the inspection object is disposed, according to the standard image and the measurement image.

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First Claim