SEMICONDUCTOR WAFER HANDLING APPARATUS AND SEMICONDUCTOR WAFER TESTING SYSTEM
Number of patents in Portfolio can not be more than 2000
United States of America
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Issued Date -
Mar 6, 2025
app pub date -
Aug 27, 2024
filing date -
Aug 27, 2024
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Abstract
A semiconductor wafer handling apparatus that moves a semiconductor wafer including a device under test (DUT) and presses a terminal of the DUT against a contactor of a probe card, the semiconductor wafer handling apparatus includes an optical probe that inputs and outputs an optical signal to and from an optical connection part of the DUT. The terminal is disposed on a first surface of the semiconductor wafer. The optical connection part is disposed on a second surface of the semiconductor wafer.
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