SCANNING METHOD AND DEVICE FOR SCANNING PROBE MICROSCOPE BASED ON HIGH-SPEED INSTANTANEOUS FORCE CONTROL
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United States of America
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Issued Date -
Mar 6, 2025
app pub date -
Mar 9, 2023
filing date -
Mar 9, 2023
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Abstract
A scanning probe microscope based on high-speed instantaneous force control is used scan a sample, which includes steps of acquiring an acting force signal between a probe unit and a sample; calculating a real amplitude signal according to the acting force signal; acquiring a set amplitude signal; acquiring the first sinusoidal signal; obtaining a target acting force signal according to the real amplitude signal, the set amplitude signal and the first sinusoidal signal; and scanning the surface of the sample in a target sample scanning mode according to the target acting force signal, wherein the target sample scanning mode represents the operating mode of scanning the surface of the sample under the indication of the target acting force signal. The method solves the problems of low peak force tapping frequency and limited scanning range, and realizes high-speed instantaneous force tapping and mechanical property measurement while ensuring the scanning range.
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