SENSOR, SENSOR SYSTEM, AND ELECTRONIC DEVICE
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United States of America
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Issued Date -
Mar 6, 2025
app pub date -
Jun 3, 2024
filing date -
Jun 3, 2024
priority date (Note) -
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status (Latency Note)
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Abstract
According to one embodiment, a sensor includes a base including a first face, a fixed portion fixed to the first face, a movable portion supported by the fixed portion, a first fixed electrode, and a first opposing fixed electrode. The fixed portion includes a first center in a first plane parallel to the first face. The movable portion includes first and second annular portions. The first fixed electrode includes first and second regions. The first opposing fixed electrode includes first and second opposing regions. The first region is provided between the second annular portion and the first annular portion. The first opposing region is provided between the second annular portion and the first region. The second region is provided between the second annular portion and the first annular portion. The second opposing region is provided between the second annular portion and the second region.
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