INJECTOR MOUNTING APPARATUS OF FURNACE

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20250075976A1
SERIAL NO

18631177

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present application provides an injector mounting apparatus of a furnace, wherein a first injector in the furnace has a main injector pipe. The injector mounting apparatus includes a first mounting component. The first mounting component has an injector mounting hole for the first injector to pass through and be disposed therein, a first edge on a side of the main injector pipe close to the inner side surface of the process tube abuts on a second edge on a side of the injector mounting hole close to the inner side surface of the process tube, and there is a first spacing between the second edge and an outer side face of the first mounting component. A flange is disposed at the bottom of the process tube, and the first mounting component is mounted on the flange by means of a first fixing member.

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Patent Owner(s)

Patent OwnerAddress
SHANGHAI HUALI MICROELECTRONICS CORPORATIONNO 6 LIANGTENG ROAD PUDONG NEW AREA SHANGHAI 201314

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Wang, Jianyong Shanghai, CN 16 29

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