PASSAGE SYSTEM FOR EXHAUST GAS TO ABATEMENT APPARATUS
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United States of America
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Issued Date -
Mar 6, 2025
app pub date -
Aug 28, 2024
filing date -
Aug 28, 2024
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Abstract
A passage system that can prevent leakage of exhaust gas delivered to an abatement reactor and can ensure safety is disclosed. The passage system includes: an exhaust-gas transfer pipe configured to deliver exhaust gas to an abatement reactor; a first two-way valve attached to the exhaust-gas transfer pipe; a bypass pipe that branches off from the exhaust-gas transfer pipe at a position upstream of the first two-way valve and bypasses the abatement reactor, and a second two-way valve attached to the bypass pipe. The first two-way valve and the second two-way valve are vertically positioned and have flow passages for the exhaust gas extending in a vertical direction.
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