DUAL REFRIGERATION SYSTEMS FOR A MONO-CRYSTAL FURNACE AND METHODS FOR PULLING A MONO-CRYSTAL
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United States of America
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Issued Date -
Mar 6, 2025
app pub date -
Jun 26, 2023
filing date -
Jun 26, 2023
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Abstract
Dual refrigeration systems for a mono-crystal furnace and methods for pulling a mono-crystal. The first heat exchange assembly includes a first heat exchange mechanism capable of exchanging heat, and a first heat exchange channel and a second heat exchange channel communicating with the first heat exchange mechanism. The second heat exchange assembly includes a second heat exchange mechanism capable of exchanging heat, and a third heat exchange channel and a fourth heat exchange channel communicating with the second heat exchange mechanism. The second heat exchange channel and the fourth heat exchange channel are communicated with a cooling assembly of a water-cooled jacket and a cooling assembly of a mono-crystal furnace, respectively. A first fluid is introduced into the first heat exchange channel. A second fluid is circulated in the second heat exchange channel, cooling assembly of water-cooled jacket, the fourth heat exchange channel, and cooling assembly of mono-crystal furnace.
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