CURVED CANTILEVER DESIGN TO REDUCE STRESS IN MEMS ACTUATOR
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United States of America
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Issued Date -
Mar 6, 2025
app pub date -
Nov 18, 2024
filing date -
Nov 18, 2024
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Abstract
The present disclosure relates to an integrated chip structure. The integrated chip structure includes a MEMS device. The MEMS device includes a frame, a proof mass, and one or more curved cantilevers coupled between the frame and the proof mass. The one or more curved cantilevers have curved outer surfaces. The curved outer surfaces have a plurality of inflection points respectively arranged between turning points. The one or more curved cantilevers include four curved cantilevers respectively arranged along a different side of the proof mass.
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