MEMS SOUND TRANSDUCER AND METHOD FOR PRODUCING SAME
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United States of America
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Issued Date -
Mar 6, 2025
app pub date -
Aug 27, 2024
filing date -
Aug 27, 2024
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Abstract
In one aspect, a MEMS sound transducer for generating and/or detecting sound waves in the audible wavelength spectrum and/or in the ultrasonic range includes a carrier and at least one piezoelectric element. The at least one piezoelectric element is arranged on the carrier and is deflectable in the direction of a stroke axis. The at least one piezoelectric element has at least one piezoelectric layer and at least one structural layer, wherein electrical signals and deflections of the at least one piezoelectric element are convertible into each other using the at least one piezoelectric layer. Additionally, the at least one structural layer is made of a polymer, with the polymer comprising a polyamide.
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