METHOD FOR MANUFACTURING ULTRASONIC TRANSDUCER, ULTRASONIC TRANSDUCER, AND DISTANCE MEASURING EQUIPMENT
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United States of America
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Mar 6, 2025
app pub date -
Jan 4, 2022
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Jan 4, 2022
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Abstract
A method for manufacturing an ultrasonic transducer comprises the following steps: A first SOI substrate including a first silicon film, a second silicon film, and an intermediate silicon oxide film sandwiched between the first silicon film and the second silicon film is prepared. A piezoelectric element is formed on the first silicon film of the first SOI substrate. The second silicon film is etched to form a diaphragm. A silicon substrate is connected to the second silicon film. An opening and a gap are formed in an acoustically resonant structure including the first SOI substrate and the silicon substrate and the diaphragm and the acoustically resonant structure are also matched in resonant frequency so as to amplify vibration of a sonic wave of the diaphragm.
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