CONTROL DEVICE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
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United States of America
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Issued Date -
Mar 6, 2025
app pub date -
Jul 10, 2024
filing date -
Jul 10, 2024
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Abstract
Provided is a control device and a substrate processing apparatus including the same. The substrate processing apparatus includes a support unit configured to support and rotate a first substrate, the support unit including a spin chuck, a spray unit configured to spray a processing fluid on the first substrate, a correction unit on a swing arm and configured to irradiate a beam onto the first substrate when the processing fluid is provided on the first substrate, wherein the swing arm is adjacent to the spin chuck and is configured to move the correction unit to a target point on the first substrate, and a controller configured to control the spin chuck and the swing arm, and correct a position error of the swing arm using a second substrate, wherein a plurality of anchor patterns are on the second substrate.
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