SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME

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United States of America

APP PUB NO 20250063781A1
SERIAL NO

18452072

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Abstract

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Semiconductor structures and methods for forming the same are provided. The semiconductor structure includes a plurality of nanostructures formed over a substrate, and an inner spacer layer between two adjacent nanostructures. The semiconductor structure includes a source/drain (S/D) structure formed adjacent to the inner spacer layer, and a barrier layer adjacent to the inner spacer layer. The barrier layer extends from the first position to the second position, and the first position is between the inner spacer layer and the nanostructure, and the second position is between the nanostructures and the S/D structure.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTDHSINCHU 300-78

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
CHEN, Yen-Ting Taichung City, TW 129 606
HUANG, Yu-Shiang Hsinchu City, TW 27 29
LEE, Wei-Yang Taipei City, TW 257 1093

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