MULTIZONE CERAMIC HEATER
Number of patents in Portfolio can not be more than 2000
United States of America
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Issued Date -
Feb 20, 2025
app pub date -
May 28, 2024
filing date -
May 28, 2024
priority date (Note) -
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Abstract
There is provided a multizone ceramic heater including a ceramic plate including an inner zone and an outer zone, an inner zone heater circuit embedded in the inner zone, an outer zone heater circuit embedded in the outer zone, one pair of first feeding terminals for feeding power to the inner zone heater circuit, one pair of second feeding terminals for feeding power to the outer zone heater circuit, and one pair of jumpers embedded in the inner zone of the ceramic plate, one of which connects one of the second feeding terminals and the outer zone heater circuit by a first junction and the other of which connects the other of the second feeding terminals and the outer zone heater circuit by a second junction. Thicknesses of the jumpers are from 1.2 to 3.0 times a thickness of the outer zone heater circuit.
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