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• G05B:CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTION....
• G01D:MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VAR....

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Leufke, Philipp	Rheinfelden, DE	3	0
# of filed Patents : 3 Total Citations : 0
Tayyub, Jawad	Maulburg, DE	2	0
# of filed Patents : 2 Total Citations : 0
Werner, Patrick	Steinen, DE	12	7
# of filed Patents : 12 Total Citations : 7

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Full Text

US Patent Application No: 2017/0016,109

THIN FILM DEPOSITING APPARATUS AND THE THIN FILM DEPOSITING METHOD USING THE SAME

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Abstract

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A thin film depositing apparatus and a thin film deposition method using the apparatus. The thin film depositing apparatus includes a chamber configured to have a substrate mounted therein, an ejection unit configured to move in the chamber and to eject a deposition vapor to the substrate, and a source supply unit configured to supply a source of the deposition vapor to the ejection unit.

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Description

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