SALT, ACID GENERATOR, RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20250060667A1
SERIAL NO

18787627

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A salt represented by formula (I), a salt or resin including a structural unit represented by formula (IP), an acid generator including the salt, an acid generator including the resin, or a resist composition including the acid generator.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
SUMITOMO CHEMICAL COMPANY LIMITEDTOKYO 104-8260

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ichikawa, Koji Osaka-shi, JP 316 1995
Kitamura, Issei Osaka-shi, JP 2 0
Terahigashi, Shohei Osaka-shi, JP 10 0

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation