PRODUCTION METHOD OF TEMPLATE, TEMPLATE BLANK, AND TEMPLATE SUBSTRATE FOR IMPRINTING, PRODUCTION METHOD OF TEMPLATE FOR IMPRINTING, AND TEMPLATE
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United States of America
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Issued Date -
Feb 20, 2025
app pub date -
Nov 5, 2024
filing date -
Nov 5, 2024
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Abstract
A template to be used for imprint lithography transferring a transfer pattern in a concave and convex structure to a resin on a transfer substrate includes a first step structure on a main surface of a base, a second step structure on the first step structure, and at an upper surface of the second step structure, a first concave and convex structure body configuring the transfer pattern, and a second concave and convex structure body configuring an alignment mark. An outer side region of the second step structure at an upper surface of the first step structure is covered with a light shielding film. A high contrast film configured by a film of a different material from a material configuring the base, is on the light shielding film and on a bottom surface of a concave part in the second concave and convex structure body.
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