METHODS OF FABRICATING NANOSCALE STRUCTURES USABLE IN MOLECULAR SENSORS AND OTHER DEVICES
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United States of America
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Feb 20, 2025
app pub date -
Nov 3, 2024
filing date -
Nov 3, 2024
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Abstract
A structure usable in a molecular sensor device comprises a substrate defining a substrate plane and spaced apart pairs of reducible metal oxide or metal nitride sheets attached to the substrate at an angle to the substrate plane. The structure further includes intervening dielectric sheets. Fabrication methods for manufacturing structures for molecular sensors are disclosed comprising oblique angle deposition of reducible metal oxide or metal nitride and dielectric layers, planarization of the resulting stack, and reduction of portions of the reducible metal oxide or metal nitride sheets to the corresponding base metal.
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