CRYOPUMP, CRYOPUMP CONTROL SYSTEM AND CRYOPUMP CONTROL METHOD
Number of patents in Portfolio can not be more than 2000
United States of America
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Issued Date -
Feb 20, 2025
app pub date -
Nov 5, 2024
filing date -
Nov 5, 2024
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Abstract
This application discloses a cryopump, including a pump housing, a radiation shield in the pump housing, a first-stage cold storage component in the pump housing, a second-stage cold storage component in the holding space of the radiation shield, a connector connecting the first-stage cold storage component and the radiation shield, and a cryopanel assembly in the holding space and connected to the second-stage cold storage component.
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