SEMICONDUCTOR STRUCTURE
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United States of America
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Issued Date -
Feb 13, 2025
app pub date -
Oct 30, 2024
filing date -
Oct 30, 2024
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Abstract
A semiconductor structure includes a substrate, an isolation structure disposed in the substrate, and a hybrid structure disposed over the isolation structure. The hybrid structure is substantially conformal with respect to a profile of the isolation structure. The hybrid structure includes an oxide component, a nitride component surrounding the oxide component, and a first polysilicon component alongside the nitride component. The nitride component includes a first upper surface closed to the first polysilicon component, and a second upper surface distal to the first polysilicon component. The second upper surface is lower than the first upper surface.
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