Inductively Coupled Plasma Light Source with Switched Power Supply
Number of patents in Portfolio can not be more than 2000
United States of America
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Issued Date -
Feb 13, 2025
app pub date -
Oct 28, 2024
filing date -
Oct 28, 2024
priority date (Note) -
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status (Latency Note)
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Abstract
A method and apparatus for generating light includes a chamber having a high voltage region, a low voltage region, and a plasma generation region that defines a plasma confinement region. A magnetic core is positioned around the chamber and is configured to generate a plasma in the plasma confinement region. A switched power supply includes a DC power supply and a switched resonant charging circuit that together generate a plurality of voltage pulses at the output causing a plurality of current pulses to be applied to the power delivery section around the magnetic core so that at least one plasma loop is established around the magnetic core that confines plasma in the plasma confinement region, thereby forming a magnetically confined Z-pinch plasma. Light generated by the Z-pinch plasma propagates out of a port in the light source.
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International Classification(s)
- 2024 Application Filing Year
- H05H Class
- 126 Applications Filed
- 8 Patents Issued To-Date
- 6.35 % Issued To-Date
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