Importance

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Abstract

A stacked structure formed of two active element layers includes: a first substrate; a first conductive surface including a first active region; a second substrate; a second conductive surface including a second active region; a compression space between the first active region of the first conductive surface and the second substrate; an elastic layer formed on the first active region of the first conductive surface or on an exposed surface of the second substrate, and including a plurality of elastic nodules compressed by relative movement of the first conductive surface and the second conductive surface toward each other in response to a voltage difference, or in response to an external force; and a first solid binding edge formed at one side of the first active region of the first conductive surface and the second conductive surface, and coupled to the first active region and the second substrate.

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First Claim