INTERPOSER AND FABRICATION THEREOF
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United States of America
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Issued Date -
Feb 13, 2025
app pub date -
Sep 11, 2023
filing date -
Sep 11, 2023
priority date (Note) -
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Abstract
An interposer includes a substrate having an inductor forming region thereon, a plurality of trenches within the inductor forming region in the substrate, a buffer layer lining interior surfaces of the plurality of trenches and forming air gaps within the plurality of trenches, and an inductor coil pattern embedded in the buffer layer within the inductor forming region.
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