SUBSTRATE TRANSFER APPARATUS INCLUDING MULTILAYER EFEM
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United States of America
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Issued Date -
Feb 13, 2025
app pub date -
Dec 7, 2023
filing date -
Dec 7, 2023
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Abstract
Disclosed is a substrate transfer apparatus including a first moving plate, a second moving plate located at a lower portion of the first moving plate, and an EFEM including a first rail, a first moving body that is moved on the first rail, and a first robot connected to the moving body and that transports a substrate, and connected to the first moving plate and the second moving plate and that provides the substrate to the first moving plate or the second moving plate.
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