Electron Suppressor Electrode for Improved Efficiency and In-Situ Electron Monitoring
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United States of America
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Issued Date -
Feb 13, 2025
app pub date -
Aug 10, 2023
filing date -
Aug 10, 2023
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Abstract
Back-streaming of electrons toward an ion beam source is prevented by disposing an electron suppressor electrode asymmetrically with respect to the ion beam and biasing a voltage of the electron suppressor electrode relative to a voltage of a target to prevent back-streaming of electrons to the ion beam source. The electron suppressor electrode can be either positively or negatively biased with respect to the target.
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