PROCESS WINDOW OPTIMIZER
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United States of America
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Feb 13, 2025
app pub date -
Oct 28, 2024
filing date -
Oct 28, 2024
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Abstract
A defect prediction method for a device manufacturing process involving processing a pattern onto a substrate, the method comprising: identifying a processing window limiting pattern (PWLP) from the pattern; determining a processing parameter under which the PWLP is processed; and determining or predicting, using the processing parameter, existence, probability of existence, a characteristic, or a combination thereof, of a defect produced from the PWLP with the device manufacturing process.
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