PROBE PIN AND PROBE CARD
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United States of America
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Issued Date -
Feb 13, 2025
app pub date -
Feb 20, 2023
filing date -
Feb 20, 2023
priority date (Note) -
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Abstract
A probe pin includes a low resistance member consisting of a first metal with a first conductivity, and a high resistance member consisting of a second metal with a second conductivity, the second metal having a resistivity higher than that of the low resistance member. The probe pin has a multi layered part between a contact part and a terminal part, where the multi layered part is configured in the order of the high resistance member, a slit of air gap, and the low resistance member, in a first direction different from a buckling direction of the probe pin at the time of inspection of a test object. The low resistance member and the high resistance member are arranged so as not to overlap with each other, when the multi layered part is viewed from the buckling direction.
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