Atomic Force Microscopy Probe with Tilted Tip and Method of Fabrication Thereof
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United States of America
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Feb 13, 2025
app pub date -
Aug 12, 2024
filing date -
Aug 12, 2024
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Abstract
A method of batch-fabricating an array of probe devices for a surface analysis instrument, such as an atomic force microscope (AFM), includes providing a wafer, and photolithographically forming a base and a cantilever for each probe. The cantilever includes a built-in angle, θ, relative to the base, and the base is substantially parallel to a sample holder when the probe device is mounted in a probe holder of the surface analysis instrument.
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