PLASMA TORCH AND PLASMA SCRUBBER APPARATUS INCLUDING THE SAME
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United States of America
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Issued Date -
Feb 6, 2025
app pub date -
Jan 30, 2024
filing date -
Jan 30, 2024
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Abstract
A plasma torch includes a cathode, a pilot electrode disposed on a first outer circumference of the cathode and separated from an exterior surface of the cathode, an electrode protection member disposed below the pilot electrode and including a first insulator, an anode disposed on a second outer circumference of a process space and disposed below the pilot electrode, and a discharge gas flow path coupled to a separation gap formed between the exterior surface of the cathode and an inner surface of the pilot electrode. The discharge gas flow path is configured to supply a discharge gas.
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