SEM NAVIGATION BY FOCUSED ION BEAM SYSTEM WITH CRYO COOLING SAMPLE STAGE
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United States of America
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Feb 6, 2025
app pub date -
Jul 30, 2024
filing date -
Jul 30, 2024
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Abstract
Embodiments of an analytical instrument system, components, and methods for preparing dose-sensitive samples for microanalysis are described. A method includes receiving location data for a material sample, locating a region of interest (ROI) of the material sample in reference to the location data, cooling the material sample to a cryogenic temperature, depositing a layer over at least a portion of the ROI at the cryogenic temperature, and removing a portion of the material sample at the cryogenic temperature.
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