INFORMATION PROCESSING METHOD, INFORMATION PROCESSING APPARATUS, AND STORAGE MEDIUM
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United States of America
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Feb 6, 2025
app pub date -
Dec 7, 2022
filing date -
Dec 7, 2022
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Abstract
An information processing method of processing information for inspecting a substrate based on a captured image of the substrate, includes: acquiring the captured image of the substrate; creating a two-dimensional histogram using a distance from a center of the substrate and a luminance value as axes regarding the acquired captured image of the substrate; extracting a specific unevenness distribution corresponding to heterogeneous unevenness in the captured image from the two-dimensional histogram based on a predetermined domain definition; and acquiring a feature amount of the extracted specific unevenness distribution and determining a type of the specific unevenness distribution based on the feature amount.
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