PUPIL FILTER WITH SPATIALLY-VARYING TRANSMISSION
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United States of America
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Issued Date -
Feb 6, 2025
app pub date -
Jul 31, 2023
filing date -
Jul 31, 2023
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Abstract
An inspection system includes a pupil filter positioned in an imaging pupil of the inspection system. The pupil filter is configured to provide spatially-varying intensity transmission. The pupil filter is a slab of glass with a patterned layer disposed on a surface of the slab of glass. The inspection system introduces a spatially-varying intensity transmission using the pupil filter.
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