Importance

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Abstract

Provided is a surface inspection device 1 comprising a sample-driving unit 4 that stably holds a sample 2 irrespective of a rotation angle and that can precisely control the position of the sample 2 relative to vertical-direction driving. The sample-driving unit 4 has a support member 4a that holds the sample 2 and that can displace a sample-holding unit 3 in the vertical direction, and a sample drive source 4b that generates drive force for driving the sample 2. Based on the in-plane position and vertical-direction position of the sample 2 as sensed by a displacement sensor 10 while a spindle shaft 5 is rotating, a controller 13 calculates a different vertical-direction adjustment amount for each in-plane position of the sample 2 and drives the sample 2 by a first adjustment amount in the vertical direction by using a vertical driving stage 6. The sample-driving unit 4 drives the sample 2 in the vertical direction by a second adjustment amount smaller than the first adjustment amount.

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First Claim