Electrochemical Layer Deposition by Anode Array Using Measurement Information
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United States of America
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Feb 6, 2025
app pub date -
Jul 23, 2024
filing date -
Jul 23, 2024
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Abstract
An apparatus and method for electrochemically depositing a layer using a reactor configured to contain an electrolyte solution with an anode array containing a plurality of independently electrically controllable anodes arranged in a two-dimensional array, a cathode, at least one sensor and a microcontroller programmed with instructions that when executed by the microcontroller cause the microcontroller to (i) control the current or voltage applied to one anode of the plurality of anodes; (ii) measure the current or the voltage of one anode of the plurality of anodes using the at least one sensor to create a measurement information; (iii) interpret the measurement information causing the microcontroller to send signals to one or more anodes in the anode array to modify their voltage and/or current to cause a localized deposition of the unitary layer structure or the series of unitary layer structures.
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