HIGH SENSITIVITY MAGNETIC SENSING MATRIX CHIP WITH TWO-DIMENSIONAL ELECTRONIC GAS CHANNEL STRUCTURE AND THE MANUFACTURING PROCESS
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United States of America
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Issued Date -
Jan 30, 2025
app pub date -
Sep 7, 2023
filing date -
Sep 7, 2023
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Abstract
A high-sensitivity two-dimensional electron gas channel structure magnetic sensing matrix chip includes a magnetic sensing matrix, a shift register, and a back-end interface circuit. The magnetic sensing matrix includes several matrix units including substrate, buffer layer, channel layer, and barrier layer. A two-dimensional electron gas channel material heterojunction structure includes buffer layer, channel layer, and barrier layer on the substrate, and the horizontal Hall element and switching device are above the channel layer. The beneficial effects include a high sensitivity magnetic sensing matrix chip with two-dimensional electronic gas channel structure can be used for real-time, static and dynamic measurement of multi-dimensional magnetic field distribution under high temperature, high pressure, high radiation and other harsh environments to carry out structural and circuit innovation and production.
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