SURFACE ACOUSTIC WAVE (SAW) DEVICE WITH ONE OR MORE INTERMEDIATE LAYERS FOR SELF-HEATING IMPROVEMENT
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United States of America
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Issued Date -
Jan 30, 2025
app pub date -
Aug 8, 2024
filing date -
Aug 8, 2024
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Abstract
Certain aspects of the present disclosure provide a surface acoustic wave (SAW) device with one or more intermediate layers for reduced self-heating and methods for fabricating such a SAW device. One example SAW device generally includes a piezoelectric layer and an interdigital transducer (IDT) disposed above the piezoelectric layer. The IDT generally includes a first electrode having a first busbar and a first plurality of fingers. The first electrode generally includes a first copper layer disposed above the piezoelectric layer, a first intermediate layer disposed above the first copper layer, the first intermediate layer comprising a different material than the first copper layer, and a second copper layer disposed above the first intermediate layer.
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