DISCHARGE ELECTRODES, MANUFACTURING METHOD OF ANODE, AND ELECTRONIC DEVICE MANUFACTURING METHOD
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United States of America
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Issued Date -
Jan 30, 2025
app pub date -
Oct 10, 2024
filing date -
Oct 10, 2024
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Abstract
Discharge electrodes to be used in a gas laser device for exciting a laser gas containing fluorine by discharge include a cathode and an anode. The anode is arranged as facing the cathode and includes an electrode base member including a metal, and a coating layer including an insulating material and coating a part of a side surface, parallel to a longitudinal direction, of the electrode base member. The coating layer includes a first portion coating a first region of the side surface and a second portion coating a second region of the side surface, located farther from the cathode than the first region in a discharge direction perpendicular to the longitudinal direction, and being thicker than the first portion.
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